Fabrication of ultrahigh-density nanowires by electrochemical nanolithography
نویسندگان
چکیده
An approach has been developed to produce silver nanoparticles (AgNPs) rapidly on semiconductor wafers using electrochemical deposition. The closely packed AgNPs have a density of up to 1.4 × 1011 cm-2 with good size uniformity. AgNPs retain their shape and position on the substrate when used as nanomasks for producing ultrahigh-density vertical nanowire arrays with controllable size, making it a one-step nanolithography technique. We demonstrate this method on Si/SiGe multilayer superlattices using electrochemical nanopatterning and plasma etching to obtain high-density Si/SiGe multilayer superlattice nanowires.
منابع مشابه
Electrochemical fabrication of Cu/Pd multilayer nanowires in polycarbonate template
In this work,copper/palladium (Cu/Pd) multilayer nanowires were successfully prepared by electrodeposition method using polycarbonate template. The fabrication of Pd/Cu multilayer nanowires was controlled by analyzing the current–time transient during electrodeposition using potentiostat. The morphological properties of the nanowires were studied by scanning electron microscopy (SEM) and resu...
متن کاملOn-wire lithography.
We report a high-throughput procedure for lithographically processing one-dimensional nanowires. This procedure, termed on-wire lithography, combines advances in template-directed synthesis of nanowires with electrochemical deposition and wet-chemical etching and allows routine fabrication of face-to-face disk arrays and gap structures in the range of five to several hundred nanometers. We stud...
متن کاملUltrahigh-density nanowire arrays grown in self-assembled diblock copolymer templates.
We show a simple, robust, chemical route to the fabrication of ultrahigh-density arrays of nanopores with high aspect ratios using the equilibrium self-assembled morphology of asymmetric diblock copolymers. The dimensions and lateral density of the array are determined by segmental interactions and the copolymer molecular weight. Through direct current electrodeposition, we fabricated vertical ...
متن کاملNanowires fine tunable fabrication by varying the concentration ratios, the etchant and the plating spices in metal-assisted chemical etching of silicon wafer.
The metal-assisted chemical etching (MACE) was used to synthesis silicon nanowires. The effect of etchant concentration, etching and chemical plating time and doping density on silicon nanowires length were investigated. It is held that the increasing of HF and H2O2 concentrations lead to etching rate increment and formation of wire-like structure. The results show that, the appropriate ratio o...
متن کاملDirect-writing of polymer nanostructures: poly(thiophene) nanowires on semiconducting and insulating surfaces.
A new technique for direct-writing of polymer nanostructures on insulating and semiconducting surfaces based on Electrochemical Dip-Pen Nanolithography (E-DPN) is described. The technique is based on electrochemical polymerization of monomers directly underneath the AFM tip. Sub-50 nm poly-3,4-ethylenedioxythiophene lines can be easily created. Such capability to direct-write and pattern polyme...
متن کامل